Our quartz tube furnace and reactor tubes are the industry standard for high-temperature semiconductor processing, laboratory analysis, and advanced industrial manufacturing. Engineered from ultra-high purity fused silica (SiO2 > 99.99%), these tubes provide exceptional thermal stability, chemical resistance, and minimal trace impurity levels to ensure the integrity of your most sensitive thermal processes.
Technical Specifications (Datasheet)
The following technical parameters define the performance limits of our furnace-grade products. These values are consistent with global industry benchmarks for high-purity fused silica.
| Property | Industrial Grade Specification |
| Material Type | High-Purity Fused Silica (Quartz) |
| Chemical Purity (SiO2) | More than 99.99% |
| Max Continuous Working Temp | 1100°C |
| Peak Working Temp (Short-term) | 1250°C |
| Coefficient of Thermal Expansion | 5.5 x 10^-7/°C |
| Softening Point | 1630°C |
| Surface Finish | Fire-polished / Optical Grade Clear |
Advanced Material Performance for Critical Processes
Minimizing metallic contamination is crucial for maintaining process yield in CVD, diffusion, and oxidation steps. Our manufacturing process ensures that alkali and transition metal impurities (such as Sodium, Potassium, and Iron) are kept at sub-ppm levels. This extreme chemical purity, combined with excellent dielectric properties and high electrical resistivity, makes our tubes the perfect, contamination-free environment for sensitive high-temperature steps inside any professional quartz tube furnace.
Maintenance & Handling Protocols
To maximize the service life of your furnace quartz tube, proper handling and preventative maintenance are vital. Devitrification (crystallization) often starts from surface contamination. We recommend never handling these components with bare hands; skin oils can cause localized crystallization at temperatures above 1000°C. Regular cleaning using a 5% hydrofluoric acid (HF) dip, followed by a thorough rinse with deionized water, is recommended to remove surface contaminants before re-installation in your quartz tube furnace.
Engineered for Extreme Performance
1. Superior Thermal Shock Resistance
Due to an exceptionally low coefficient of thermal expansion, our quartz reactor tubes can withstand rapid temperature cycling without structural failure. A tube heated to 1100°C can be rapidly cooled or subjected to extreme thermal gradients, making them ideal for rapid thermal processing (RTP).For more information on raw material durability, see our Clear Quartz Tubes guide.
2. Semiconductor-Grade Purity
Minimizing metallic contamination is essential for CVD and diffusion processes. Our manufacturing process ensures that trace elements (Al, Fe, Na, Ca, Mg) are kept at sub-ppm levels, preventing impurity migration into silicon wafers or sensitive chemical samples during high-temperature cycles.
3. Dimensional Precision for Large Bore Applications
We bridge the gap between small laboratory needs and large-scale industrial production. We offer large diameter quartz tubes with outer diameters ranging from 50mm up to 450mm, maintaining strict control over wall thickness and concentricity (standard tolerance within 10%).
Custom Fabrication & Secondary Processing
Every quartz tube furnace setup requires specific connection types and geometries. We provide full-service secondary fabrication to deliver a drop-in solution for your equipment:
- Closed-End Processing: Precision vacuum sealing for sensor protection, thermocouples, or specialized reaction chambers.
- Quartz Flanges & Ground Joints: We offer high-vacuum seals, tapered joints, and spherical joints welded with high-precision alignment.
- Gas Ports & Inlets: Custom-welded quartz ports and side-arms for precise atmosphere delivery and controlled gas flow.
- Surface Treatments: Options for localized frosting (sandblasting) or opaque coatings to manage light diffusion or mechanical grip.
Core Industry Applications
Our high-purity fused quartz tubes are the backbone of several high-tech sectors:
- Semiconductor Industry: Used as diffusion tubes, LPCVD reactor tubes, and APCVD process chambers.
- Scientific Research: Serving as core tubes for vertical and horizontal laboratory furnaces in materials science.
- Photovoltaics (Solar): Large-bore tubes for silicon ingot processing and solar cell thermal treatment.
- Chemical Engineering: High-pressure and corrosive atmosphere reaction vessels where standard glass would fail.
Maintenance & Acid Cleaning Protocols
To maximize the service life of your furnace quartz tube, regular maintenance is mandatory. We recommend a 5% to 10% Hydrofluoric acid (HF) cleaning protocol to remove surface contaminants.
Note: Always ensure the tube is bone-dry before re-inserting it into a hot furnace to prevent devitrification. If you need a custom quote, please visit our Contact Us page.